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Ion-irradiation enhanced epitaxial growth of sol–gel TiO2 films

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Abstract

We report the epitaxial growth of sol–gel TiO2 films by using ion-irradiation enhanced synthesis. Our present study shows that the ion-beam process can provide highly crystalline TiO2 even at 350°C. Nuclear energy deposition at amorphous/crystalline interface plays a dominant role in the epitaxial growth of the films at the reduced temperature via a defect-migration mechanism. In addition, the ion irradiation allows for increasing the film density by balancing the crystallization rate and the escape rate of organic components.

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References

  1. J.C. Pivin, P. Colombo, A. Martucci, G.D. Soraru, E. Pippel, M. Sendova-Vassileva, J. Sol-Gel Sci. Technol. 26, 251 (2003)

    Article  Google Scholar 

  2. J.C. Pivin, S. Esnouf, F. Singh, D.K. Avasthi, Appl. Phys. Lett. 98, 023908 (2005)

    Google Scholar 

  3. A. Lucca, R. Ghisleni, J.-K. Lee, Y.Q. Wang, M. Nastasi, J. Dong, A. Mehner, Nucl. Instrum. Methods Phys. Res. B 266, 2457 (2008)

    Article  ADS  Google Scholar 

  4. T.E. Levine, P. Revesz, E.P. Giannelis, J.W. Mayer, J. Vac. Sci. Technol. B 12, 986 (1994)

    Article  Google Scholar 

  5. L.M. Wang, S.X. Wang, W.L. Gong, R.C. Ewing, W.J. Weber, Mater. Sci. Eng. A 253, 106 (1998)

    Article  Google Scholar 

  6. L. Pelaz, L.A. Marqués, J. Barbolla, J. Appl. Phys. 96, 5947 (2007)

    Article  ADS  Google Scholar 

  7. Y. Zhang, J. Lian, C.M. Wang, W. Jiang, R.C. Ewing, W.J. Weber, Phys. Rev. B 72, 094112 (2005)

    Article  ADS  Google Scholar 

  8. F. Priolo, E. Rimini, Mater. Sci. Rep. 5, 319 (1990)

    Article  Google Scholar 

  9. L. Csepregi, E.F. Kennedy, J.W. Mayer, T.W. Sigmon, J. Appl. Phys. 49, 3906 (1978)

    Article  ADS  Google Scholar 

  10. N. Yu, P.C. McIntyre, T.E. Levine, E.P. Giannelis, J.W. Mayer, M. Nastasi, Philos. Mag. Lett. 73, 359 (1996)

    Article  ADS  Google Scholar 

  11. B. O’regan, M. Grätzel, Nature 353, 737 (1991)

    Article  Google Scholar 

  12. A. Fujishima, K. Honda, Nature 238, 37 (1972)

    Article  ADS  Google Scholar 

  13. M. Burgos, M. Langlet, Thin Solid Films 349, 19 (1999)

    Article  ADS  Google Scholar 

  14. T. Lopez, E. Sanchez, P. Bosch, Y. Meas, R. Gomez, Mater. Chem. Phys. 32, 141 (1992)

    Article  Google Scholar 

  15. Y. Djaoued, S. Badilescu, P. Ahshrit, J. Sol-Gel Sci. Technol. 24, 247 (2002)

    Article  Google Scholar 

  16. M. Murakami, Y. Matsumoto, K. Nakajima, T. Makino, Y. Segawa, T. Chikyow, P. Ahmet, M. Kawasaki, H. Koinuma, Appl. Phys. Lett. 78, 2664 (2001)

    Article  ADS  Google Scholar 

  17. J.P. de Souza, C.A. Cima, P.F.P. Fichtner, H. Boudinov, J. Appl. Phys. 95, 877 (2004)

    Article  ADS  Google Scholar 

  18. Y. Aoki, T. Kunitake, A. Nakao, Chem. Mater. 17, 450 (2005)

    Article  Google Scholar 

  19. T.F. Stoica, M. Gartner, T. Stoica, M. Losurdo, V.S. Teodorescu, M.G. Blanchin, M. Zaharescu, J. Optoelectron. Adv. Mater. 7, 2353 (2005)

    Google Scholar 

  20. C.J. Brinker, G.W. Scherer, Sol–Gel Science (Academic Press, San Diego, 1990)

    Google Scholar 

  21. V. Heera, T. Henkel, R. Kögler, W. Skorupa, Phys. Rev. B 52, 15776 (1995)

    Article  ADS  Google Scholar 

  22. K.A. Jackson, J. Mater. Res. 3, 1218 (1988)

    Article  ADS  Google Scholar 

  23. K. Oyoshi, S. Hishita, H. Haneda, J. Appl. Phys. 87, 3450 (2000)

    Article  ADS  Google Scholar 

  24. N. Yu, P.C. McIntyre, M. Nastasi, K.E. Sickafus, Phys. Rev. B 52, 17518 (1995)

    Article  ADS  Google Scholar 

  25. J. Nowotny, T. Bak, T. Burg, Ionics 13, 71 (2007)

    Article  Google Scholar 

  26. D. Eom, C.S. Hwang, H.J. Kim, M.-H. Cho, K.B. Chung, Electrochem. Solid-State Lett. 11, G33 (2008)

    Article  Google Scholar 

  27. N.C. Hernandez, J.F. Sanz, L.J. Alvarez, J. Phys., Condens. Matter 21, 305502 (2009)

    Article  Google Scholar 

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Correspondence to Jung-Kun Lee.

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Lee, JK., Jung, H.S., Wang, Y. et al. Ion-irradiation enhanced epitaxial growth of sol–gel TiO2 films. Appl. Phys. A 103, 179–184 (2011). https://doi.org/10.1007/s00339-010-5985-5

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  • DOI: https://doi.org/10.1007/s00339-010-5985-5

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